Patent · US Active

Manufacturing management using tool operating data

US8634949B2 · kind B2 · utility

4Cited by
20References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 20, 2010
Grant dateJan 21, 2014
Priority date
Expiry dateApr 7, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P90/30
  • WIPO fieldIT methods for management
  • WIPO sectorElectrical engineering

Abstract

A solution for managing a manufacturing environment using operating data for each of a plurality of tools in the manufacturing environment. The operating data can include actual resource consumption data and/or actual exhaust generation data for a tool while the tool implements at least a portion of a recipe to manufacture one of a plurality of types of products manufactured in the manufacturing environment. Operation of the manufacturing environment can be configured to optimize one or more aspects of resource consumption and/or exhaust generation during the manufacture of desired quantities of the plurality of types of products within a desired time frame using the operating data.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.