Patent · US Active

Methods for making micro needles and applications thereof

US8637351B2 · kind B2 · utility

10Cited by

1References

6Claims

0Family size

Assignee

SILEX MICROSYSTEMS AB · SE

Inventors

Edvard Kalvesten · Stuvsta-Snättringe, SE
Thorbjörn Ebefors · Huddinge, SE
Thierry Corman · Bromma, SE

Key dates

Filing date	Oct 21, 2011
Grant date	Jan 28, 2014
Priority date	—
Expiry date	Oct 21, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2224/8592
WIPO fieldMedical technology
WIPO sectorInstruments

Abstract

The invention relates in a general aspect to a method of making vertically protruding elements on a substrate, said elements having a tip comprising at least one inclined surface and an elongated body portion extending between said substrate and said tip. The method comprises an anisotropic, crystal plane dependent etch forming said inclined surface(s); and an anisotropic, non crystal plane dependent etch forming said elongated body portion; combined with suitable patterning processes defining said protruding elements to have a predetermined base geometry.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.