Arrangements for creating wafer movement control macros
US8639381B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 24, 2010 |
| Grant date | Jan 28, 2014 |
| Priority date | — |
| Expiry date | Jun 1, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67745
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An arrangement for creating a set of wafer transfer instructions configured to transfer a wafer between an origination wafer-holding location and a destination wafer-holding location in a plasma cluster tool is provided. The arrangement includes means for receiving a first user-provided location indicator and a second user-provided location indicator on an on-screen graphical representation of the plasma cluster tool. The arrangement also includes means for ascertaining data pertaining to a set of paths between the first user-provided location indicator and the second user-provided location indicator. The arrangement further includes means for forming the set of wafer transfer instructions responsive to the data pertaining to the set of paths, the set of wafer transfer instructions being configured to transfer the wafer along a set of wafer-holding locations associated with one of the set of paths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.