Patent · US Active

Method and apparatus of operating a scanning probe microscope

US8646109B2 · kind B2 · utility

17Cited by

7References

21Claims

0Family size

Assignee

Bruker Nano, Inc. · US

Inventors

Yan Hu · Zhejiang, CN
Shuiqing Hu · Lompoc, US
Chanmin Su · Ventura, US
Jian Shi · Suzhou, CN
Ji Ma · Kirkland, US

Key dates

Filing date	Dec 1, 2010
Grant date	Feb 4, 2014
Priority date	—
Expiry date	Mar 16, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01R2103/00
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.