Gas abatement
US8647580B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2005 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Feb 6, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
System for treating an effluent fluid stream from a process tool including a vacuum pump (16) for drawing an effluent stream from the process tool chamber, an abatement device (12) for treating the effluent stream and a liquid ring pump (14) for at least partially evacuating the abatement device (12). During use, the abatement device (12) converts one or more components of the effluent stream, for example F2 or a PFC, into one or more liquid-soluble a compounds, for example HF, that are less harmful to the environment. The liquid ring pump (14) receives the effluent stream and a liquid, and exhausts a solution of the liquid and the liquid-soluble component of the effluent stream. The liquid ring pump (14) thus operates as both a wet scrubber and an atmospheric vacuum pumping stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.