Metal-oxide films from small molecules for lithographic applications
US8647809B2 · kind B2 · utility
3Cited by
8References
28Claims
0Family size
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Key dates
| Filing date | Jul 7, 2011 |
| Grant date | Feb 11, 2014 |
| Priority date | — |
| Expiry date | Sep 4, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24802
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Metal-oxide films for lithographic applications are provided. The films are formed from compositions comprising metal-oxide precursor compounds including metals and metalloids other than silicon. These films are easily produced and can be modified with a variety of ligands, including alkoxides, phenoxides, carboxylates, beta-diketones, and beta-ketoesters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.