Patent · US Active

Method and apparatus of using peak force tapping mode to measure physical properties of a sample

US8650660B2 · kind B2 · utility

19Cited by

19References

8Claims

0Family size

Assignee

Bruker Nano, Inc. · US

Inventors

Jian Shi · Suzhou, CN
Yan Hu · Zhejiang, CN
Shuiqing Hu · Lompoc, US
Ji Ma · Kirkland, US
Chanmin Su · Ventura, US

Key dates

Filing date	Nov 29, 2011
Grant date	Feb 11, 2014
Priority date	—
Expiry date	Nov 29, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01Q60/32
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.