Patent · US Active

Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate

US8650769B2 · kind B2 · utility

1Cited by
3References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 23, 2010
Grant dateFeb 18, 2014
Priority date
Expiry dateJan 6, 2031

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49826
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.