Assembly comprising a measuring scale attached to a substrate and method for holding a measuring scale against a substrate
US8650769B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2010 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | Jan 6, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An assembly including a substrate and a scale held on the substrate, wherein the scale has a measuring graduation, and the scale is held on the substrate by pneumatic suction. The scale is braced on the substrate via two-dimensionally distributed, spaced-apart supports, which are disposed facing a measurement area defined by the measuring graduation and wherein adjacent ones of the supports are spaced apart from one another at a mutual period that is less than a thickness of the scale. In addition, the supports have a structure such that a connection by optical contact bonding between the supports and the scale and/or between the supports and the substrate is prevented at least in the measurement area. A space between the scale and the substrate is sealed off from surroundings by a sealing structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.