Method for producing a three-dimensionally controlled surface coating in a cavity
US8652583B2 · kind B2 · utility
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3References
12Claims
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Key dates
| Filing date | Dec 10, 2010 |
| Grant date | Feb 18, 2014 |
| Priority date | — |
| Expiry date | Oct 10, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0315
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The cavity has first and second main walls covered by a photoresist. The photoresist is subjected to electronic or electromagnetic radiation of wavelength comprised between 12.5 nm and 15 nm. A first thickness of the photoresist is exposed to form a first area of sacrificial material and a second area of different nature defining the surface coating. The sacrificial material is removed, the surface coating is formed and has a surface against one of the main walls and a free opposite surface. The lateral dimensions of the surface coating are defined in the cavity by the radiation through the first main wall.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.