Patent · US Active

Method of fabricating an electromechanical component using graphene

US8656584B2 · kind B2 · utility

12Cited by

5References

13Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Jean-Christophe P. Gabriel · Pinole, US
Philippe Andreucci · Moirans, FR
Thomas Ernst · Morette, FR
Thierry Poiroux · Voiron, FR

Key dates

Filing date	Sep 17, 2010
Grant date	Feb 25, 2014
Priority date	—
Expiry date	Apr 5, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49155
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Method of fabricating an electro-mechanical microsystem provided with at least one fixed part comprising a bar, and at least one mobile part in rotation around at least one portion of said bar, the method comprising the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.