Auger elemental identification algorithm
US8658973B2 · kind B2 · utility
2Cited by
10References
20Claims
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Key dates
| Filing date | Jun 7, 2013 |
| Grant date | Feb 25, 2014 |
| Priority date | — |
| Expiry date | Jun 7, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2218/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
System and methods for decomposing an Auger electron spectrum into elemental and chemical components, includes conditioning and input spectrum to generate a normalized input spectrum; determining statistical correlation between the normalized input spectrum and stored elemental spectral signatures; and characterizing elemental or chemical species in the input spectrum from the statistical correlation, wherein said conditioning the input spectrum includes estimating a background signal of non-Auger electrons in the input spectrum and subtracting the estimated background signal from the input spectrum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.