Indium oxide sintered compact and sputtering target
US8664136B2 · kind B2 · utility
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25Claims
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Key dates
| Filing date | Jun 1, 2009 |
| Grant date | Mar 4, 2014 |
| Priority date | — |
| Expiry date | Aug 13, 2029 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/786
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A sintered body includes an indium oxide crystal, and an oxide solid-dissolved in the indium oxide crystal, the oxide being oxide of one or more metals selected from the group consisting of aluminum and scandium, the sintered body having an atomic ratio “(total of the one or more metals)/(total of the one or more metals and indium)×100)” of 0.001% or more and less than 45%.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.