Electron microscope and specimen analyzing method
US8664598B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 28, 2011 |
| Grant date | Mar 4, 2014 |
| Priority date | — |
| Expiry date | Jul 31, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electron microscope has a focused ion beam column positioned relative to an electron beam column so that the focused ion beam substantially perpendicularly intersects the electron beam. A backscattered electron detector is positioned relative to the focused ion beam column so that the direction normal to a detection plane of the backscattered electron detector is substantially perpendicular to the direction of the focused ion beam. The backscattered electron detector is configured and positioned to detect backscattered electrons released in a spread of at least about 70 degrees in width from the surface of the section by irradiation of the section with the electron beam 1a.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.