Method and apparatus for in situ testing of gas flow controllers
US8667830B2 · kind B2 · utility
10Cited by
16References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2010 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | May 16, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.