Methods and apparatus for smart abatement using an improved fuel circuit
US8668868B2 · kind B2 · utility
24Cited by
26References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2008 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Oct 21, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2258/0216
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for abating effluent from an electronic device manufacturing process is provided, including abating the effluent in a thermal abatement tool to form abated effluent; determining whether the abated effluent contains one or more chemical species of interest; and changing one or more operating parameters of the thermal abatement tool based upon the determination. Numerous other embodiments are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.