Patent · US Active

Method for eliminating the metal catalyst residues on the surface of wires produced by catalytic growth

US8669171B2 · kind B2 · utility

58Cited by

0References

12Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Simon Perraud · Bandol, FR
Philippe Coronel · Barraux, FR

Key dates

Filing date	Aug 29, 2011
Grant date	Mar 11, 2014
Priority date	—
Expiry date	Aug 31, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/02664
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method is provided for eliminating catalyst residues that are present on the surface of solid structures. The solid structures are made from a first material and are obtained by catalytic growth from a substrate. The method includes the following steps: catalytically growing, from the catalyst residues, solid structures made from a second material; and selectively eliminating the solid structures made from the second material, thereby eliminating the catalyst residues.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.