Patent · US Active

Method for depositing a transparent conductive oxide (TCO) film on a substrate and thin-film solar cell

US8669463B2 · kind B2 · utility

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1References

8Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Martin Dimer · Dresden, DE
Tina Schoessler · Dresden, DE
Thomas Knoth · Dresden, DE
Ralf STURM · Dresden, DE
Uwe GRAUPNER · Dresden, DE
Martin THUMSCH · Dresden, DE
Hans Hecht · Stuttgart, DE

Key dates

Filing date	Oct 21, 2010
Grant date	Mar 11, 2014
Priority date	—
Expiry date	Jul 13, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02E10/50
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method is provided for depositing a transparent conductive oxide (TCO) layer on a substrate, in which contaminations of the layers of the layer system is reduced through the diffusion of material from the substrate, and whose layer properties in respect to coupling and transmission of light are optimized. For that purpose, a barrier layer, a seed layer and a transparent conductive oxide layer are directly successively deposited on the substrate. Also, a thin-film solar cell is described which comprises such a transparent conductive oxide layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.