Parallel image processing system
US8669989B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2011 |
| Grant date | Mar 11, 2014 |
| Priority date | — |
| Expiry date | Oct 30, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T11/40
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
System and method for a parallel image processing mechanism for applying mask data patterns to substrate in a lithography manufacturing process are disclosed. In one embodiment, the parallel image processing system includes a graphics engine configured to partition an object into a plurality of trapezoids and form an edge list for representing each of the plurality of trapezoids, and a distributor configured to receive the edge list from the graphics engine and distribute the edge list to a plurality of scan line image processing units. The system further includes a sentinel configured to synchronize operations of the plurality of scan line image processing units, and a plurality of buffers configured to store image data from corresponding scan line image processing units and outputs the stored image data using the sentinel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.