Patent · US Active

Sensor system

US8671752B2 · kind B2 · utility

6Cited by
5References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 21, 2011
Grant dateMar 18, 2014
Priority date
Expiry dateJan 5, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/48137
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor system includes a supporting element and a sensor element attached to the supporting element and having a main plane of extension. The supporting element has (i) at least one contact element for electrical contacting of the sensor system and (ii) at least one relief structure for stress decoupling, the at least one relief structure being situated in a plane parallel to the main plane of extension essentially between the at least one contact element and the sensor element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.