Integrated pressure sensor seal
US8671766B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 2011 |
| Grant date | Mar 18, 2014 |
| Priority date | — |
| Expiry date | May 7, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/1461
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Some embodiments of the present disclosure relate to improved package assemblies for pressure sensing elements. Rather than leaving a pressure sensing element unabashedly exposed to the ambient environment in a manner that makes it susceptible to damage from stray wires, dirt, and the like; the improved package assemblies disclosed herein include a cover that helps form an enclosure around the pressure sensing element. The cover includes a fluid-flow channel with a blocking member arranged therein. The fluid-flow channel puts the pressure sensing element in fluid communication with the external environment so pressure measurements can be taken, while the blocking member helps protect the pressure sensing element from the external environment (e.g., stray wires and dirt to some extent). In this way, the package assemblies disclosed herein help promote more accurate and reliable pressure measurements than previous implementations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.