Isolation structure for backside illuminated image sensor
US8674469B2 · kind B2 · utility
5Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2010 |
| Grant date | Mar 18, 2014 |
| Priority date | — |
| Expiry date | Jan 10, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/811
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A backside illuminated image sensor includes an isolation structure passing through a substrate, a sensor element formed overlying the front surface of the substrate, and a color filter formed overlying the back surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.