Method of producing a photonic device and corresponding photonic device

US8676002B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Laurent Grenouillet · Voiron, FR
• Jean-Marc Fedeli · Saint-Égrève, FR
• Liu Liu · San Diego, US
• Regis Orobtchouk · Le Pont-de-Beauvoisin, FR
• Philippe Regreny · Dole, FR
• Günther Roelkens · Melle, BE
• Pedro Rojo-Romeo · Val-de-Reuil, FR
• Dries Van Thourhout · Evergem, BE

Key dates

• Filing date: Feb 1, 2010
• Grant date: Mar 18, 2014
• Expiry date: Jul 26, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/136
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Method of producing a photonic device including at least one light source and at least one photodetector on a structure including a waveguide layer, this method comprising the following steps: a) growing successively on a substrate (10), a photodetection structure (11) and a light source structure (12), the photodetection structure and the light source structure being made of a stack of layers, the light source layers being stacked on top of the photodetector layers and both structures sharing one of these layers. b) bonding the structure obtained by step a) to the said waveguide structure (2), the light source structure being in contact with the said waveguide structure (2), c) removing the substrate (10) from the structure obtained by step b), d) etching the structure (3) obtained by step c) to define the at least one photodetector (4), e) etching the structure obtained by step d) to define the at least one light source (5), f) forming electrodes (44, 43; 54, 53) on the least one photodetector (4) and on the least one light source (5).