Imprint apparatus and article manufacturing method
US8678808B2 · kind B2 · utility
6Cited by
1References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2011 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Jan 10, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The imprint apparatus of the present invention molds an imprint material on a substrate using a mold and cures the imprint material to form a pattern on the substrate. The apparatus includes a holder configured to attract the mold to hold the mold; and a pressure reduction device configured to reduce a back pressure of the mold held by the holder, wherein the apparatus is configured to reduce the back pressure by the pressure reduction device in parallel with release of the mold from the imprint material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.