Multiple precursor showerhead with by-pass ports
US8679956B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 28, 2013 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Jan 28, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus that includes a processing chamber that includes a showerhead with separate inlets and channels for delivering separate processing gases into a processing volume of the chamber without mixing the gases prior to entering the processing volume is provided. The showerhead includes one or more cleaning gas conduits configured to deliver a cleaning gas directly into the processing volume of the chamber while by-passing the processing gas channels. The showerhead may include a plurality of metrology ports configured to deliver a cleaning gas directly into the processing volume of the chamber while by-passing the processing gas channels. As a result, the processing chamber components can be cleaned more efficiently and effectively than by introducing cleaning gas into the chamber only through the processing gas channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.