Three dimensional inspection and metrology based on short pulses of light
US8681343B2 · kind B2 · utility
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6References
18Claims
0Family size
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Key dates
| Filing date | Oct 27, 2011 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Jan 17, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2522
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and a method may be provided. The system may include an illumination module arranged to illuminate an object by short pulses of light that form at least one spot on the object; a collection module that comprises a sensor that is arranged to generate detection signals representative of three dimensional information about the object: and a mechanical stage that is arranged to introduce a movement between the object and at least one of the collection module and the illumination module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.