X-ray window
US8681943B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2009 |
| Grant date | Mar 25, 2014 |
| Priority date | — |
| Expiry date | Nov 28, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/082
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A self-cleaning X-ray window arrangement is provided that includes a primary X-ray-transparent window element, separating an ambient pressure region from an intermediate region, and a secondary X-ray-transparent window element, separating the intermediate region from a reduced pressure region. A contaminant is expected to deposit on a side of the secondary element facing the reduced pressure region. A heat source is adapted to heat a portion of the secondary window element thereby evaporating contaminant. The secondary element shields the primary element from the reduced pressure region, in which contaminant is present, whereas the pressure-tight primary window element carries most of the differential pressure between the ambient pressure region and the reduced pressure region. Several features help to decrease the rate at which contaminant enters the intermediate region. By maintaining the pressure in the intermediate region close to the reduced pressure, the mechanical stress on the secondary window element can be limited as well as the exposure to harmful gases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.