Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material
US8685123B2 · kind B2 · utility
3Cited by
13References
22Claims
0Family size
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Key dates
| Filing date | Oct 14, 2005 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Nov 15, 2029 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/12
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.