Inventor · Sutton, MA, US

Andrew G. Haerle

21Patents
5h-index
17Co-inventors
66Inventor score

Filing activity: Sep 29, 1995 → Apr 12, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6296716A Process for cleaning ceramic articles Emerging Cross-Sectional Technologies 43 Expired
US6162543A High purity siliconized silicon carbide having high thermal shock resistance Emerging Cross-Sectional Technologies 26 Expired
US6565667B2 Process for cleaning ceramic articles Emerging Cross-Sectional Technologies 15 Expired
US9120200B2 Polishing slurry including zirconia particles and a method of using the polishing slurry Emerging Cross-Sectional Technologies 7 Active
US6403155B2 High purity, siliconized silicon carbide having high thermal shock resistance Emerging Cross-Sectional Technologies 6 Expired
US6554909B1 Process for cleaning components using cleaning media Emerging Cross-Sectional Technologies 5 Expired
US8980113B2 Chemical mechanical planarization using nanodiamond Electricity 4 Active
US6723437B2 Semiconductor processing component having low surface contaminant concentration Emerging Cross-Sectional Technologies 3 Expired
US7053411B2 Method for treating semiconductor processing components and components formed thereby Emerging Cross-Sectional Technologies 3 Expired
US8685123B2 Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material Chemistry; Metallurgy 3 Active
US9343321B2 Chemical mechanical planarization using nanodiamond Electricity 3 Active
US8105135B2 Polishing slurries Emerging Cross-Sectional Technologies 3 Active
US6825123B2 Method for treating semiconductor processing components and components formed thereby Emerging Cross-Sectional Technologies 3 Expired
US7993420B2 Ceria material and method of forming same Chemistry; Metallurgy 3 Active
US6881262B1 Methods for forming high purity components and components formed thereby Chemistry; Metallurgy 3 Expired
US8216328B2 Ceria material and method of forming same Chemistry; Metallurgy 1 Active
US5599407A Method for estimating inclusion content of metals using reflectance Physics 0 Expired
US10640680B2 Chemical-mechanical processing slurry and methods Electricity 0 Active
US8343415B2 Ceramic particulate material and processes for forming same Emerging Cross-Sectional Technologies 0 Active
US9410063B2 Polishing slurry including zirconia particles and a method of using the polishing slurry Emerging Cross-Sectional Technologies 0 Active
US7727919B2 High resistivity silicon carbide Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.