Method for the realization of a crossbar array of crossed conductive or semi-conductive access lines
US8685819B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 7, 2011 |
| Grant date | Apr 1, 2014 |
| Priority date | — |
| Expiry date | Jul 24, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/8836
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for making a crossbar array of crossed conductive or semi-conductive access lines on a substrate, the crossbar array including on a crossbar array insulator, in a plane parallel to the substrate, a first level of lines including a plurality of first lines parallel with each other made of a conductive or semi-conductive material; on the first level of lines, a second level of lines including a plurality of second lines parallel with each other made of a conductive or semi-conductive material, the second lines being substantially perpendicular to the first lines. The method includes forming, on the substrate, a first cavity of substantially rectangular shape; forming a second cavity of substantially rectangular shape superimposed to the first cavity, the first and second cavities intersecting each other perpendicularly so as to form a resultant cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.