Patent · US Active

Magnetic holding device and method for holding a substrate

US8686819B2 · kind B2 · utility

11Cited by

9References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Uwe Schuessler · Aschaffenburg, DE
Stefan Bangert · Lauentheil, DE
Heike Landgraf · Bruchköbel, DE

Key dates

Filing date	Jun 18, 2010
Grant date	Apr 1, 2014
Priority date	—
Expiry date	May 15, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/707
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A magnetic holding device is adapted for holding a mask during processing of a substrate. The magnetic holding device includes a substrate carrier which is adapted for receiving the substrate to be processed. The substrate carrier includes a permanent magnet adapted for generating a first magnetic field for holding the mask. Furthermore, the substrate carrier includes a solenoid which is adapted for generating a second magnetic field adapted for at least partially compensating the first magnetic field. In case the first magnetic field is compensated, at least partially, by means of the second magnetic field, the mask is released from the substrate carrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.