Patent · US Active

Enhancing accuracy of fast high-resolution X-ray diffractometry

US8687766B2 · kind B2 · utility

19Cited by
88References
18Claims
0Family size

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Key dates

Filing dateJul 12, 2011
Grant dateApr 1, 2014
Priority date
Expiry dateJan 22, 2032

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01T1/17
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.