Crystal pulling apparatus and method for the production of heavy crystals

US8691009B2 · kind B2 · utility

Assignee

• Siltronic AG · DE

Inventors

• Burkhard Altekruger · Alzenau, DE
• Stefan Henkel · Altena, DE
• Axel Vonhoff · Friesenheim, DE
• Erich Tomzig · Altötting, DE
• Dieter Knerer · Burghausen, DE

Key dates

• Filing date: Apr 9, 2009
• Grant date: Apr 8, 2014
• Expiry date: Feb 6, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T117/1072
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A pulling apparatus and a method with which especially heavy crystals (5) can be pulled using the Czochralski method utilizing the pulling apparatus. For this purpose the neck (4) of the crystal (5) has an enlargement (10) beneath which extends the support device. This device includes latches (7), which are moved from a resting position into an operating position in which the latches (7) extend beneath the enlargement (10). Each latch (7) is supported on the base body such that it is swivellable about a pivot axis (8) and can assume two stable positions, namely the resting position and the operating position. Each of these positions is defined by a stop on the base body. When the latch rests on the one stop, its center of gravity, viewed from the neck (4), is located on the other side of the pivot axis (8). When the latch rests on the other stop, the center of gravity is located on this side of the pivot axis (8). The actuation of the latches (7) takes place with actuation means disposed stationarily in the apparatus.