Patent assignee · DE · COMPANY

Siltronic AG

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299Patents
256Active
299Granted
57Portfolio score

Filing activity: Oct 22, 1999 → Jan 23, 2023 · 88 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6899762B2 Epitaxially coated semiconductor wafer and process for producing it Emerging Cross-Sectional Technologies 27 Expired
US8088219B2 Monocrystalline semiconductor wafer comprising defect-reduced regions and method for producing it Emerging Cross-Sectional Technologies 21 Active
US6861360B2 Double-sided polishing process for producing a multiplicity of silicon semiconductor wafers Performing Operations; Transporting 14 Expired
US7785706B2 Semiconductor wafer and process for its production Emerging Cross-Sectional Technologies 13 Active
US7828893B2 Silicon wafer and process for the heat treatment of a silicon wafer Emerging Cross-Sectional Technologies 11 Active
US9458554B2 Semiconductor wafer composed of monocrystalline silicon and method for producing it Emerging Cross-Sectional Technologies 11 Active
US8376811B2 Method for the double sided polishing of a semiconductor wafer Performing Operations; Transporting 11 Active
US7935614B2 Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers Emerging Cross-Sectional Technologies 11 Active
US8395164B2 Multilayered semiconductor wafer and process for manufacturing the same Electricity 11 Active
US8113913B2 Method for the simultaneous grinding of a plurality of semiconductor wafers Performing Operations; Transporting 11 Active
US7867059B2 Semiconductor wafer, apparatus and process for producing the semiconductor wafer Performing Operations; Transporting 9 Active
US6773333B2 Method for cutting slices from a workpiece Performing Operations; Transporting 9 Expired
US6995077B2 Epitaxially coated semiconductor wafer and process for producing it Emerging Cross-Sectional Technologies 8 Expired
US8372298B2 Method for producing epitaxially coated silicon wafers Electricity 8 Active
US11380621B2 Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer Electricity 8 Active
US7052948B2 Film or layer made of semi-conductive material and method for producing said film or layer Electricity 8 Expired
US6793837B2 Process for material-removing machining of both sides of semiconductor wafers Performing Operations; Transporting 8 Expired
US7416962B2 Method for processing a semiconductor wafer including back side grinding Electricity 8 Expired
US7793647B2 Method and device for sawing a workpiece Emerging Cross-Sectional Technologies 7 Active
US7208043B2 Silicon semiconductor substrate and preparation thereof Emerging Cross-Sectional Technologies 7 Expired
US7276168B2 Method for supply of constant-concentration ozonated water Chemistry; Metallurgy 7 Expired
US7077726B2 Semiconductor wafer with improved local flatness, and method for its production Emerging Cross-Sectional Technologies 7 Expired
US11869942B2 Heteroepitaxial wafer and method for producing a heteroepitaxial wafer Electricity 7 Active
US7815489B2 Method for the simultaneous double-side grinding of a plurality of semiconductor wafers Performing Operations; Transporting 7 Active
US7938911B2 Process for cleaning a semiconductor wafer using a cleaning solution Chemistry; Metallurgy 7 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.