System and method for handling multiple workpieces for matrix configuration processing
US8698104B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 8, 2010 |
| Grant date | Apr 15, 2014 |
| Priority date | — |
| Expiry date | May 26, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.