Aaron P. Webb
17Patents
5h-index
39Co-inventors
62Inventor score
Filing activity: Jun 26, 2006 → Jun 15, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10854483B2 | High pressure steam anneal processing apparatus | Electricity | 14 | Active |
| US9082799B2 | System and method for 2D workpiece alignment | Emerging Cross-Sectional Technologies | 12 | Active |
| US7833351B2 | Batch processing platform for ALD and CVD | Emerging Cross-Sectional Technologies | 9 | Active |
| US9091491B2 | Cooling plates and semiconductor apparatus thereof | Electricity | 7 | Active |
| US8698104B2 | System and method for handling multiple workpieces for matrix configuration processing | Electricity | 5 | Active |
| US9490153B2 | Mechanical alignment of substrates to a mask | Emerging Cross-Sectional Technologies | 4 | Active |
| US9694989B2 | Workpiece handling system and methods of workpiece handling | Performing Operations; Transporting | 1 | Active |
| US9995631B2 | System and method to monitor semiconductor workpiece temperature using thermal imaging | Physics | 1 | Active |
| US10446710B2 | Transfer chamber and method of using a transfer chamber | Emerging Cross-Sectional Technologies | 0 | Active |
| US11306824B2 | Dual port remote plasma clean isolation valve | Emerging Cross-Sectional Technologies | 0 | Active |
| US10217657B2 | Active substrate alignment system and method | Physics | 0 | Active |
| US9333733B2 | Multi-part mask for implanting workpieces | Emerging Cross-Sectional Technologies | 0 | Active |
| US11856685B2 | Stiffened RF LINAC coil inductor with internal support structure | Electricity | 0 | Active |
| US9659677B2 | Shielding device for substrate edge protection and method of using same | Electricity | 0 | Active |
| US10969029B2 | Low particle protected flapper valve | Emerging Cross-Sectional Technologies | 0 | Active |
| US12431329B2 | Method of assembling drift tube assemblies in ion implantors | Electricity | 0 | Active |
| US9570309B2 | Mask alignment system for semiconductor processing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.