Substrate handler
US8698327B2 · kind B2 · utility
0Cited by
27References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2012 |
| Grant date | Apr 15, 2014 |
| Priority date | — |
| Expiry date | Jan 17, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.