Inspection recipe generation and inspection based on an inspection recipe
US8699784B2 · kind B2 · utility
2Cited by
2References
33Claims
0Family size
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Key dates
| Filing date | Aug 4, 2011 |
| Grant date | Apr 15, 2014 |
| Priority date | — |
| Expiry date | Apr 24, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
System, computer readable medium and method. The system includes (i) a data obtaining module arranged to obtain data about at least one portion of an inspected article; and (ii) a processor arranged to perform at least one processing operation of the data out of: (a) processing the data to provide the inspection recipe; and (b) processing the data, while utilizing the inspection recipe, to detect defects; wherein the inspection recipe comprises multiple zones of multiple types of zones; wherein a zone of a first type of zones differs from a zone of a second type of zone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.