Slimming method of carbon-containing thin film and oxidation apparatus
US8703000B2 · kind B2 · utility
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4References
7Claims
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Key dates
| Filing date | Dec 19, 2011 |
| Grant date | Apr 22, 2014 |
| Priority date | — |
| Expiry date | Jun 20, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A slimming method includes transferring an object to be processed on which a patterned carbon-containing thin film is formed into a process chamber in an oxidation apparatus; and oxidizing and removing the surface of the carbon-containing thin film by an oxidizing gas while supplying moisture into the process chamber, to reduce widths of the protruded portions on the pattern of the carbon-containing thin film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.