Pixel sensors of multiple pixel size and methods of implant dose control

US8704325B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• John J. Ellis-Monaghan · Grand Isle, US
• Jeffery P. GAMBINO · Gaylordsville, US
• Daniel N. Maynard · Craftsbury Common, US
• Richard J. Rassel · Tappahannock, US

Key dates

• Filing date: Sep 12, 2012
• Grant date: Apr 22, 2014
• Expiry date: Sep 12, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F39/014

Abstract

CMOS pixel sensors with multiple pixel sizes and methods of manufacturing the CMOS pixel sensors with implant dose control are provided. The method includes forming a plurality of pixel sensors in a same substrate and forming a masking pattern over at least one of the plurality of pixel sensors that has a pixel size larger than a non-masked pixel sensor of the plurality of pixel sensors. The method further includes providing a single dosage implant to the plurality of pixel sensors. The at least one of the plurality of pixel sensors with the masking pattern receives a lower dosage than the non-masked pixel sensor.