Micro-electro mechanical systems (MEMS) having outgasing prevention structures and methods of forming the same
US8716852B2 · kind B2 · utility
22Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | Feb 17, 2012 |
| Grant date | May 6, 2014 |
| Priority date | — |
| Expiry date | Mar 6, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A device includes a capping substrate bonded with a substrate structure. The substrate structure includes an integrated circuit structure. The integrated circuit structure includes a top metallic layer disposed on an outgasing prevention structure. At least one micro-electro mechanical system (MEMS) device is disposed over the top metallic layer and the outgasing prevention structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.