Method and apparatus for selectively removing anti-stiction coating
US8728845B2 · kind B2 · utility
2Cited by
3References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2011 |
| Grant date | May 20, 2014 |
| Priority date | — |
| Expiry date | Sep 14, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00269
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present disclosure provides various methods for removing an anti-stiction layer. An exemplary method includes forming an anti-stiction layer over a substrate, including over a first substrate region of a first material and a second substrate region of a second material, wherein the second material is different than the first material; and selectively removing the anti-stiction layer from the second substrate region of the second material without using a mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.