Adjustable resistor

US8729668B2 · kind B2 · utility

Assignee

• STMicroelectronics (Rousset) SAS · FR

Inventors

• Pascal Fornara · Saint-Maximin-la-Sainte-Baume, FR
• Arnaud Regnier · Sarlat-la-Canéda, FR

Key dates

• Filing date: Jul 19, 2012
• Grant date: May 20, 2014
• Expiry date: Jul 19, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D84/811

Abstract

An adjustable resistor formed on a first insulating layer of a substrate, including: a first polysilicon layer covered with a second insulating layer of a first thickness, except in a region where the first polysilicon layer is covered with a thin insulator layer of a second thickness smaller than the first thickness; a second polysilicon layer covering the second insulating layer and the thin insulator layer; on each side of the second insulating layer and at a distance from it, a first and a second conductive vias providing access to the terminals of the resistor on the first polysilicon layer; and a third conductive via providing access to a contacting area on the second polysilicon layer.