Patent · US Active

Mask support, mask assembly, and assembly comprising a mask support and a mask

US8733277B2 · kind B2 · utility

2Cited by

1References

22Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Heike Landgraf · Bruchköbel, DE
Uwe Schussler · Aschaffenburg, DE
Stefan Bangert · Lauentheil, DE

Key dates

Filing date	Dec 1, 2008
Grant date	May 27, 2014
Priority date	—
Expiry date	Jul 4, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49863
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.