Electromechanical transducer device and method of forming a electromechanical transducer device

US8736145B2 · kind B2 · utility

Assignees

• Freeescale Semiconductor, Inc. · US
• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Lianjun Liu · Gilbert, US
• Sergio Pacheco · Chandler, US
• Francois Perruchot · Issy-les-Moulineaux, FR
• Emmanuel Defay · Saint-Égrève, FR
• Patrice Rey · Voiron, FR

Key dates

• Filing date: Nov 25, 2009
• Grant date: May 27, 2014
• Expiry date: Sep 15, 2030

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/032
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micro or nano electromechanical transducer device formed on a semiconductor substrate comprises a movable structure which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer having a first thermal response characteristic, at least one layer of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer. The thermal compensation layer is different to the at least one layer and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature.