Substrate inspection
US8736831B2 · kind B2 · utility
3Cited by
17References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 15, 2012 |
| Grant date | May 27, 2014 |
| Priority date | — |
| Expiry date | May 15, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/958
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various embodiments for substrate inspection are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.