Micromachined inertial sensor devices
US8739626B2 · kind B2 · utility
38Cited by
46References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 3, 2010 |
| Grant date | Jun 3, 2014 |
| Priority date | — |
| Expiry date | May 19, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined inertial sensor with a single proof-mass for measuring 6-degree-of-motions. The single proof-mass includes a frame, an x-axis proof mass section attached to the frame by a first flexure, and a y-axis proof mass section attached to the frame by a second flexure. The single proof-mass is formed in a micromachined structural layer and is adapted to measure angular rates about three axes with a single drive motion and linear accelerations about the three axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.