Transport device having a deflectable sealing frame

US8740537B2 · kind B2 · utility

Assignee

• SINGULUS TECHNOLOGIES AG · DE

Inventors

• Michael Reising · Mömbris, DE
• Stefan Kempf · Alzenau, DE
• Georg Roth · Gelnhausen, DE

Key dates

• Filing date: Apr 23, 2010
• Grant date: Jun 3, 2014
• Expiry date: Dec 10, 2030

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67742
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport element (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure element (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.