Multiple inlet vacuum pumps
US8740588B2 · kind B2 · utility
12Cited by
10References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 21, 2010 |
| Grant date | Jun 3, 2014 |
| Priority date | — |
| Expiry date | Aug 5, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/24
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first (120) and second (122) pump stage, and so that molecules entering the second inlet (28) pass to the outlet through an inter-stage volume (121) and second pump stage (122); wherein the first (120) and second (122) pump stages each comprise a turbo-molecular sub-stage (120a, 122a) and a molecular drag sub-stage (120b, 122b).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.