Method for manufacturing solar cell and solar cell manufactured by the same method
US8741160B2 · kind B2 · utility
2Cited by
3References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 20, 2010 |
| Grant date | Jun 3, 2014 |
| Priority date | — |
| Expiry date | Mar 4, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/547
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed are a method for manufacturing a solar cell by processing a surface of a silicon substrate for a solar cell, a solar cell manufactured by the method, and a substrate processing system for performing the method. The method for manufacturing a solar cell comprises protrusion forming step including wet-etching process and for forming a plurality of minute protrusions on a light receiving surface of a crystalline silicon substrate, and planarization step of planarizing the bottom surface, the opposite surface to the light receiving surface of the substrate during or after the protrusion forming step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.