Apparatus and method for multiple symmetrical divisional gas distribution
US8746284B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 11, 2011 |
| Grant date | Jun 10, 2014 |
| Priority date | — |
| Expiry date | Oct 13, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87885
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus and method for multiple symmetrical divisional gas distribution providing a mounting plate, a plurality of manifolds coupled to the mounting plate, a center purge block coupled to the mounting plate and the plurality of manifolds, a plurality of reactant distribution blocks, wherein each reactant distribution block is stacked atop each other to form a reactant distribution block stack, wherein the reactant distribution block stack sits atop the center purge block, a coupling mechanism to secure the plurality of reactant distribution blocks of the reactant distribution block stack together; and a top cap coupled to the reactant distribution block stack and the coupling mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.